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日期:2024-07-08
The X-ray LIGA process was originally developed at the Forschungszentrum
Karlsruhe, Germany, ... SEM picture of a polymer LIGA structure made by
moulding....
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日期:2024-07-06
The LIGA-process is used to manufacture micro structures by deep X-ray
lithography. LIGA is the german acronym for lithography, electroplating and
moulding ......