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![Datasheet electrostatic chuck - Berliner Glas]()
www.google.com.twThe electrostatic chuck (ESC or e-chuck) is used in many semicon- ductor processes to hold the wafer during processing. It uses a static electric field to clamp ...瀏覽：331 -
![electrostatic chuck (ESC)]()
www.google.com.twOxford Plasma Technology: electrostatic chuck (ESC)瀏覽：372
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日期：2024-07-06
The electrostatic chuck (ESC) is used in a variety of semiconductor processes to
hold ... are biased with high voltage to establish an electrostatic holding force....
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日期：2024-07-06
Electrostatic-Driven Handling Technology. Trek has developed technology which
advances electrostatic-driven handling in a variety of applications....
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日期：2024-07-06
2013年11月21日 ... Study on the Electrode Voltage to the Wafer-center Deviation During Wafer
Release in an Electrostatic Chuck (ESC). 作者: 陳韋閔. Chen, Wei- ......
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日期：2024-07-08
Page 1. Principles of Electrostatic Chucks. 7 — Frequently Asked Questions;
Applications. Overview. In these pages are answers to most of the questions we
are ......
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日期：2024-07-07
FM Industries offers electrostatic chucks services. ... Thermal Sprayed
Electrostatic Chuck Design and Manufacturing. Electrostatic Chucks. FM
Industries ......
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日期：2024-07-05
High plasma-resistant chucks perform well in a wide range of operating
temperatures. An internal electrode is embedded to utilize the electrostatic force ......
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日期：2024-07-12
2011年9月13日 - 2 分鐘 - 上傳者：TrekInc
Technology delivers 3x improvement in throughput and other benefits....
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