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![Effects of showerhead shapes on the flowfields in a RF-PECVD reactor]()
chem.skku.ac.kr2004年8月26日 - The showerhead in the chemical vapor deposition (CVD) reactor has the shape of a ... vertical thermal PECVD reactors with a showerhead, in.瀏覽：1405 -
![Patent US20120108066 - Pecvd showerhead configuration for cmp ...]()
www.google.com2012年5月3日 - A dielectric deposition tool for forming a silicon dioxide layer on a wafer with a TEOS showerhead which delivers a flow rate per unit area from ...瀏覽：1356
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日期：2024-08-24
2013年6月25日 - A dielectric deposition tool for forming a silicon dioxide layer on a wafer with a TEOS showerhead which delivers a flow rate per unit area from ......
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日期：2024-08-24
Basic PECVD Plasma Processes (SiH. 4 ... PECVD SiOx: SiH x. + N. 2 ..... It is quite common to see PECVD showerhead holes becoming enlarged. This is ......
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日期：2024-08-20
Historically, Plasma Enhanced Chemical Vapour Deposition (PECVD) is a technique that has been ... This causes corrosion of the assembly and showerhead....
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日期：2024-08-18
2004年8月26日 - In this case, the better choice of growth device seems to be the class of vertical thermal PECVD reactors with a showerhead, in which a ......
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日期：2024-08-21
Quote on PECVD Systems, Plasma Enhanced Chemical Vapor Deposition ( PECVD) with showerhead to create consistent films on substrates....
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日期：2024-08-22
NANO-MASTER, Inc. PECVD systems are capable of depositing high quality ... To generate plasma, it uses RF shower head electrode or Hollow Cathode RF ......
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日期：2024-08-24
2014年2月25日 - Simulation-Based Optimization of a Vector Showerhead System for the ... Kim, “ Effects of showerhead shapes on the flowfields in a RF-PECVD ......
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