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![Stress Control of Si-based PECVD Dielectrics Final]()
www.plasmatherm.comThe Si-based dielectric films, silicon dioxide (SiO2) and silicon nitride. (SiNx) prepared ... In some of these applications, there are requirements for PECVD SiO2.瀏覽：547
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日期：2024-08-05
and structural properties of SiO2 thin films prepared by. PECVD from SiH4 and N2O precursors. We have mainly investigated the influence of the N2O/SiH4 flow....
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日期：2024-08-08
2014年11月19日 - I think, 250°C is the lowest possible process temperature for PECVD ... I ask because Au and PECVD SiO2 should work quite well and your ......
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日期：2024-08-06
Formation of silicon oxide layers SiO2. In semiconductor technology, silicon oxide layers are mainly used as dielectrics or latterly also for MEMS (micro electro ......
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日期：2024-08-09
PECVD Grown SiO2 Film Process Optimization. Song Ping, Lian Jie, Gao Shang, Li Ping, Wang Xiao, Wu Shiliang, Ma Zheng. (Shandong University Shandong ......
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日期：2024-08-09
Brazilian Journal of Physics, vol. 31, no. 2, June, 2001. 299. Analysis of SiO2 Thin Films Deposited by PECVD. Using an Oxygen-TEOS-Argon Mixture. Carlos E....
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日期：2024-08-09
chemical vapor deposition (PECVD) driven by an inductively coupled plasma (ICP) for ... We found that the SiO2 deposited using by PECVD with TEOS/N2/O2....
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日期：2024-08-04
PECVD SiO2 films were obtained at low temperatures(...
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