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        旋塗式玻璃SOG (Spin-on glass)是液態SiO2,晶片旋塗SOG後可增加平坦性。為將 SOG轉換成固態SiO2層,必須將晶片置於400~450℃的爐管,蒸除SOG內的溶劑
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      • www.google.com.tw
        SOG spin on glass coating。旋轉塗佈 ... SOG是將含有介電材料的液態溶劑以旋轉 塗佈(spin Coating)方式,均勻地塗佈在晶圓表面,以填補沉積介電層凹陷的孔洞。
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    日期:2024-07-26
    8 Jun 2000 ... Standard Operating Procedure: Spin-on-Glass, Surface Level ... Spin-on-glass ( SOG) is a type of glass that can be applied as a liquid and ......
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    日期:2024-07-20
    Chapter 1: Introduction to Spin-On Glass Materials & Applications ______ 5 .... from highly doped spin-on glass - SOG (or spin-on dopant - SOD) is one of the....
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    日期:2024-07-22
    塗式玻璃(Spin-on glass,簡稱SOG) 材料,. 因其具有低的介電常數,良好的熱穩定 性,. 低漏電流以及製程容易,逐漸成為未來所需. 的低介電常數材料製程技術。...
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    日期:2024-07-20
    Abstract - Spin-on-Glass (SOG), an interlayer dielectric material applied in ... between SOG and silicon dioxide guarantee that the SOG technique will provide....
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    日期:2024-07-20
    Abstract: Spin-on-glass (SOG), an interlayer dielectric material applied in liquid form to ... of SOG technology to provide an interlayer dielectric in multilevel metal  ......
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    日期:2024-07-25
    spin-on-glass SOG wafer bonding technique that can bond compound semiconductors and silicon without using chemical-mechanical polishing, surface etching ......
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    日期:2024-07-22
    Honeywell's Accuglass® spin-on glass (SOG) mate- rials differ significantly from other spin-on materials used in IC fabrication technology such as photoresist or ......
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    日期:2024-07-20
    Spin-on glass (SOG) is a mixture of SiO2 forming chemicals and dopants (often boron or ... The SOG is applied to a clean silicon wafer by spin-coating. The SOG  ......