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Dopant Diffusion (1) Predeposition (2) Drive-in
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日期:2024-09-07
EE143 F2010. 1. Dopant Diffusion. (1) Predeposition dopant gas. SiO. 2. SiO. 2. Si dose control. (2) Drive-in. Turn off dopant gas or seal surface with oxide. SiO....看更多