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![SMIF Load Port Transfer (LPT) | Brooks Automation](https://www.iarticlesnet.com/pub/img/site/s_25.jpeg)
SMIF Load Port Transfer (LPT) | Brooks Automation
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日期:2024-07-24
SMIF-LPT (Load Port Transfer) is an ergonomically designed SMIF-I/O integrates SMIF-Pod cassette loading and unloading into a wide variety of 200mm and 150mm wafer ......看更多