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![Effects of showerhead shapes on the flowfields in a RF-PECVD reactor](https://www.iarticlesnet.com/pub/img/site/s_05.jpeg)
Effects of showerhead shapes on the flowfields in a RF-PECVD reactor
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日期:2024-08-21
2004年8月26日 - The showerhead in the chemical vapor deposition (CVD) reactor has the shape of a ... vertical thermal PECVD reactors with a showerhead, in....看更多